Analysis case: Evaluation of the oxide film on the surface of solder balls.
Evaluation case of spherical shape samples
In AES analysis, the SEM observation function is included, allowing for the measurement of specific areas on the sample surface. Additionally, since measurements can be taken in sub-micrometer micro-regions, it is possible to target specific areas for measurement not only on flat samples like substrates but also on samples with spherical or curved shapes, which are less affected by curvature. Below is an example of evaluating the oxide film thickness on solder ball surfaces with different surface shapes.
- 企業：一般財団法人材料科学技術振興財団 MST
- 価格：Other
